Development of a Micro-diaphragm Pump with Piezoelectric Device

In this study, a new design of MaHou one-side actuating micro-diaphragm pump with piezoelectric device has been successfully developed by using its harmonic resonance of working fluid with system components (valve, diaphragm) in the pump chamber. The micro-diaphragm pump with two valves is fabricated in aluminum case by using highly accurate CNC machine, and cross-section dimensions are 5mm times 28mm. Both valves and diaphragm are manufactured from PDMS. The amplitude of vibration by a piezoelectric device produces an oscillating flow which may change the chamber volume by changing the curvature of a diaphragm. Several experimental set-ups for performance test in a single micro-diaphragm pump, isothermal flow open system, and a closed notebook water cooling system are designed and executed. The performance of one-side actuating micro-diaphragm pump is affected by the design of check valves, diaphragm, piezoelectric device, chamber volume, voltage and frequency. The measured maximum flow rate of present design is 72 ml/min at zero total pump head in the ranges of operation frequency 70-180 Hz. It can be applied in a liquid cooling system for notebook computer or in other related areas.