Title :
Impact of low-k on crosstalk [deep sub-micron technologies]
Author :
Servel, G. ; Deschacht, D. ; Saliou, F. ; Mattei, J.L. ; Huret, F.
Author_Institution :
Lab. d´´Informatique de Robotique et de Microelectronique de Montpellier, France
Abstract :
With the reduction of distances between wires in deep sub-micron technologies, coupling capacitances are becoming significant. This increase of capacity causes noise capable of propagating a logical fault. A poor evaluation of the crosstalk could be at the root of a malfunction of the circuit. Closed-form formulas are particularly efficient at determining design rules. From an analytical expression for crosstalk evaluation, we explore the performance gain through different intra-layer dielectrics, for a given typical geometry of an upper metal level of a deep sub-micron technology. This model predicts that by using a low-k dielectric equal to two, one can reduce the crosstalk voltage by about 25%, which can be employed on a possible reduction of the space between lines.
Keywords :
VLSI; capacitance; crosstalk; dielectric thin films; integrated circuit interconnections; integrated circuit modelling; integrated circuit noise; permittivity; EM analysis; circuit malfunction; closed-form formulas; coupling capacitances; crosstalk evaluation; crosstalk voltage reduction; deep submicron technologies; design rules; electromagnetic analysis; intra-layer dielectrics; logic fault propagation; low-k intra-layer dielectrics; model; noise; upper metal level; Capacitance; Circuit faults; Circuit noise; Coupling circuits; Crosstalk; Dielectrics; Geometry; Performance analysis; Performance gain; Wires;
Conference_Titel :
Quality Electronic Design, 2002. Proceedings. International Symposium on
Print_ISBN :
0-7695-1561-4
DOI :
10.1109/ISQED.2002.996757