• DocumentCode
    2429482
  • Title

    Design of ESD protection device using statistical methods

  • Author

    Shigyo, N. ; Kawashima, H. ; Yasuda, S.

  • Author_Institution
    Syst. LSI Design Div., Toshiba Corp., Japan
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    337
  • Lastpage
    340
  • Abstract
    This paper describes an ESD protection device design to minimize its area Ap while maintaining the breakdown voltage VESD. Hypothesis tests were performed to find the applied surge condition and to select control factors for the design-of-experiments (DOE). Also, TCAD was used to estimate VESD. An optimum device structure, where a salicide block was employed, was found using statistical methods and TCAD.
  • Keywords
    VLSI; design of experiments; electrostatic discharge; integrated circuit design; monolithic integrated circuits; protection; semiconductor device breakdown; technology CAD (electronics); DOE; ESD protection device design; TCAD; VLSI circuits; applied surge condition; breakdown voltage; control factors selection; design-of-experiments; optimum device structure; salicide block; statistical methods; Design methodology; Electrostatic discharge; Large scale integration; Performance evaluation; Protection; Statistical analysis; Testing; US Department of Energy; Variable structure systems; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Quality Electronic Design, 2002. Proceedings. International Symposium on
  • Print_ISBN
    0-7695-1561-4
  • Type

    conf

  • DOI
    10.1109/ISQED.2002.996769
  • Filename
    996769