DocumentCode
2430200
Title
Diamond high-temperature power devices
Author
Umezawa, Hitoshi ; Shikata, Shin-Ichi
Author_Institution
Diamond Res. Center, Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
fYear
2009
fDate
14-18 June 2009
Firstpage
259
Lastpage
262
Abstract
In this paper, the potential and the experimental results of high power Schottky barrier diodes on epitaxial diamond films have been presented. Increase of the Schottky barrier height improves reverse operation limit up to 3.1 MV/cm, which value is higher than the Emax of SiC. The reverse leakage current of the diamond SBDs is kept low as 10-4 A/cm2 at 415 K. Low on-resistance with good metal/diamond stability is also realized at high temperature operation.
Keywords
Schottky barriers; Schottky diodes; diamond; elemental semiconductors; leakage currents; power semiconductor diodes; semiconductor epitaxial layers; Jk-C; Schottky barrier height; epitaxial diamond films; high power Schottky barrier diodes; metal-diamond stability; reverse leakage current; temperature 415 K; Charge carrier processes; Electric breakdown; Impurities; Leakage current; Material properties; Schottky barriers; Schottky diodes; Silicon carbide; Temperature; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Power Semiconductor Devices & IC's, 2009. ISPSD 2009. 21st International Symposium on
Conference_Location
Barcelona
ISSN
1943-653X
Print_ISBN
978-1-4244-3525-8
Electronic_ISBN
1943-653X
Type
conf
DOI
10.1109/ISPSD.2009.5158051
Filename
5158051
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