DocumentCode :
2430222
Title :
The threshold voltage model of a SOI-MOSFET on films with Gaussian profile
Author :
Ravariu, Cristian ; Rusu, Adrian ; Ravariu, Florina ; Dobrescu, D. ; Dobrescu, Lidia
Author_Institution :
Fac. of Electron. & Telecommun., Politehnic Univ. of Bucharest, Romania
fYear :
2000
fDate :
2000
Abstract :
The analytical models for electric field and potential distributions are useful for a lot of SOI devices, like SOI-MOSFET, SOI-BJT, three-dimensional device, SOI sensors and the others. For example, they are necessary for establish the inversion or accumulation conditions for front and back interfaces. The paper refers to a one-dimensional analysis, both for partially and fully depleted devices on films with nonuniform doping. The goal of this paper is to obtain an accurate model for the field and the potential distribution in the SOI structures with Gaussian doping concentration of impurities in the film. The results have been used for threshold voltage deduction, but they represent a reference point in developing of new models for SOI-devices fabricated on Gaussian profile films. In the fully depleted films case, the depletion of the silicon substrate for gate voltages that entirely depleted the film was considered. The results were compared with PISCES numerical simulations and were in good agreement
Keywords :
Gaussian distribution; MOSFET; doping profiles; inversion layers; semiconductor device models; silicon-on-insulator; Gaussian doping concentration; Gaussian profile; PISCES numerical simulations; SOI-MOSFET; Si; accumulation conditions; analytical models; electric field distributions; fully depleted devices; gate voltages; inversion conditions; nonuniform doping; one-dimensional analysis; partially depleted devices; potential distribution; potential distributions; threshold voltage; threshold voltage model; Analytical models; Doping; Electric potential; Impurities; Numerical simulation; Semiconductor films; Semiconductor process modeling; Silicon; Substrates; Threshold voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Devices, Circuits and Systems, 2000. Proceedings of the 2000 Third IEEE International Caracas Conference on
Conference_Location :
Cancun
Print_ISBN :
0-7803-5766-3
Type :
conf
DOI :
10.1109/ICCDCS.2000.869846
Filename :
869846
Link To Document :
بازگشت