Title :
Hot-carrier luminescence measurements by means of laser scanning microscopy
Author :
Zappa, R. ; Zappa, F. ; Ghioni, M. ; Drodofsky, U.
Author_Institution :
Politecnico di Milano, Italy
Abstract :
We employed for the first time solid-state single photon avalanche detectors (SPADs) in a laser scanning microscope (LSM). These devices led to an improvement of the LSM performances in the inspection of microelectronic devices and circuits, enhancing the obtainable depth discrimination and contrast of the final image. Thanks to the high sensitivity of SPAD devices, it was also possible to envisage an innovative application of LSM for measuring the weak visible and near-infrared luminescence emitted by microelectronic devices
Keywords :
automatic optical inspection; avalanche photodiodes; fault diagnosis; hot carriers; integrated circuit measurement; measurement by laser beam; optical microscopy; SPADs; contrast; hot-carrier luminescence measurements; inspection; laser scanning microscopy; microelectronic circuits; near-infrared luminescence; obtainable depth discrimination; single photon avalanche detectors; weak visible luminescence; Focusing; Hot carriers; Inspection; Luminescence; Microelectronics; Optical microscopy; Optical sensors; Solid lasers; Solid state circuits; Surface emitting lasers;
Conference_Titel :
Devices, Circuits and Systems, 2000. Proceedings of the 2000 Third IEEE International Caracas Conference on
Conference_Location :
Cancun
Print_ISBN :
0-7803-5766-3
DOI :
10.1109/ICCDCS.2000.869857
