Title :
A CMOS eddy current sensor for microsystems
Author :
Gomez, Javier ; Esteve, Daniel ; Simonne, Jean
Author_Institution :
Lab. for Anal. & Archit. of Syst., Toulouse, France
Abstract :
This papers reports our contribution to the design of an eddy current sensor. The objective of this study is to conceive an Eddy current electromagnetic sensor in the area of the Nondestructive Testing. The sensor is integrated in a CMOS technology with an operational amplifier in the same substrate. A microsystem integrates the CMOS eddy current sensor that is used to detect cracks and irregularities of metallic targets to make a fast and reliable internal inspection
Keywords :
CMOS integrated circuits; crack detection; eddy current testing; electric current measurement; microsensors; CMOS eddy current sensor; crack detection; electromagnetic microsystem; inspection; metallic target; nondestructive testing; operational amplifier; Bridge circuits; CMOS technology; Eddy currents; Inductors; Intelligent sensors; Microsensors; Operational amplifiers; Optical amplifiers; Optical sensors; Spirals;
Conference_Titel :
Devices, Circuits and Systems, 2000. Proceedings of the 2000 Third IEEE International Caracas Conference on
Conference_Location :
Cancun
Print_ISBN :
0-7803-5766-3
DOI :
10.1109/ICCDCS.2000.869859
