Title :
4H-SiC bipolar junction transistors: From research to development - A case study: 1200 V, 20 A, stable SiC BJTs with high blocking yield
Author :
Zhang, Qingchun ; Burk, Al ; Husna, Fatima ; Callanan, Robert ; Agarwal, Anant ; Palmour, John ; Stahlbush, Robert ; Scozzie, Charles
Author_Institution :
Cree Inc., Research Triangle Park, NC, USA
Abstract :
In this paper, for the first time, large area SiC BJTs were fabricated on SiC wafers with reduced Basal Plane Dislocations (BPDs). We have demonstrated: (1) stable performance on 1200 V, 20 A SiC BJTs after long duration of electrical stress at different current densities up to 150 A/cm2; (2) a blocking yield of >80% with low leakage current (<20 nA at 1800 V) on 3" wafers along with current gains in a range of 35-40. Both breakthroughs highlight the possibility for SiC BJTs to be commercialized and utilized in power electronics.
Keywords :
current density; dislocations; leakage currents; power bipolar transistors; silicon compounds; wide band gap semiconductors; BJTs; SiC; basal plane dislocations; blocking yield; current 20 A; current densities; electrical stress; leakage current; power bipolar junction transistor; voltage 1200 V; voltage 1800 V; Commercialization; Conductivity; Costs; Fabrication; Frequency; Laboratories; MOSFETs; Silicon carbide; Stress; Temperature;
Conference_Titel :
Power Semiconductor Devices & IC's, 2009. ISPSD 2009. 21st International Symposium on
Conference_Location :
Barcelona
Print_ISBN :
978-1-4244-3525-8
Electronic_ISBN :
1943-653X
DOI :
10.1109/ISPSD.2009.5158071