Title :
ZrO2-TiO2 Thin Films and Resonators for Mid-Infrared Integrated Photonics
Author :
Feipeng Jiang ; Ningyuan Duan ; Hongtao Lin ; Lan Li ; Juejun Hu ; Lei Bi ; Haipeng Lu ; Xiaolong Weng ; Jianliang Xie ; Longjiang Deng
Author_Institution :
State Key Lab. of Electron. Thin Films & Integrated Devices, Univ. of Electron. Sci. & Technol. of China, Chengdu, China
Abstract :
We present a novel MIR transparent ZrO2-TiO2 thin film material system deposited at room temperature. Micro disk resonator showing high quality factor at 5.2 μm wavelength is demonstrated, indicating their promising potential for integrated MIR photonic applications.
Keywords :
Q-factor; integrated optics; micro-optics; microcavities; optical films; optical resonators; titanium compounds; zirconium compounds; ZrO2-TiO2; integrated MIR photonic applications; microdisk resonator; mid-infrared integrated photonics; quality factor; room temperature; thin films; wavelength 5.2 mum; Optical device fabrication; Optical fibers; Optical films; Optical imaging; Optical refraction; Optical resonators; Mid-infrared; chemical sensing; optical resonators; thin films;
Conference_Titel :
Photonics Society Summer Topical Meeting Series, 2014 IEEE
Conference_Location :
Montreal, QC
Print_ISBN :
978-1-4799-2766-1
DOI :
10.1109/SUM.2014.27
