• DocumentCode
    243095
  • Title

    ZrO2-TiO2 Thin Films and Resonators for Mid-Infrared Integrated Photonics

  • Author

    Feipeng Jiang ; Ningyuan Duan ; Hongtao Lin ; Lan Li ; Juejun Hu ; Lei Bi ; Haipeng Lu ; Xiaolong Weng ; Jianliang Xie ; Longjiang Deng

  • Author_Institution
    State Key Lab. of Electron. Thin Films & Integrated Devices, Univ. of Electron. Sci. & Technol. of China, Chengdu, China
  • fYear
    2014
  • fDate
    14-16 July 2014
  • Firstpage
    63
  • Lastpage
    64
  • Abstract
    We present a novel MIR transparent ZrO2-TiO2 thin film material system deposited at room temperature. Micro disk resonator showing high quality factor at 5.2 μm wavelength is demonstrated, indicating their promising potential for integrated MIR photonic applications.
  • Keywords
    Q-factor; integrated optics; micro-optics; microcavities; optical films; optical resonators; titanium compounds; zirconium compounds; ZrO2-TiO2; integrated MIR photonic applications; microdisk resonator; mid-infrared integrated photonics; quality factor; room temperature; thin films; wavelength 5.2 mum; Optical device fabrication; Optical fibers; Optical films; Optical imaging; Optical refraction; Optical resonators; Mid-infrared; chemical sensing; optical resonators; thin films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photonics Society Summer Topical Meeting Series, 2014 IEEE
  • Conference_Location
    Montreal, QC
  • Print_ISBN
    978-1-4799-2766-1
  • Type

    conf

  • DOI
    10.1109/SUM.2014.27
  • Filename
    6902988
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=243095