Title :
MEMS Based 3-D Micro Coaxial Transmission Lines
Author :
Natarajan, Saravana P. ; Weller, Thomas M.
Author_Institution :
Center for Wireless & Microwave Inf. Syst., South Florida Univ., Tampa, FL
Abstract :
Micro coaxial transmission lines are advantageous over planar counterparts such as microstrip and coplanar waveguides due to their shielded nature for use at mm-wave frequencies. This paper proposes micro coaxial transmission lines implemented on CMOS grade silicon wafers, suitable for integration with conventional MMIC circuitry. Lines of varying characteristic impedances were designed, fabricated and analyzed in the 1 to 40 GHz range. Normalized best case return loss values are in the range of 15 dB and an insertion loss of 4 dB/cm at 30 GHz
Keywords :
CMOS integrated circuits; MMIC; coaxial cables; coplanar waveguides; micromechanical devices; microstrip lines; transmission lines; 1 to 40 GHz; 3D micro coaxial transmission lines; CMOS technology; MEMS; coplanar waveguides; microstrip waveguides; Coaxial components; Coplanar transmission lines; Coplanar waveguides; Distributed parameter circuits; Frequency; Micromechanical devices; Microstrip; Planar transmission lines; Planar waveguides; Transmission lines;
Conference_Titel :
Wireless and Microwave Technology Conference, 2006. WAMICON '06. IEEE Annual
Conference_Location :
Clearwater Beach, FL
Print_ISBN :
1-4244-0849-0
Electronic_ISBN :
1-4244-0849-0
DOI :
10.1109/WAMICON.2006.351930
