Sensitivity characteristics of Ag doped BaTiO3-CuO mixed oxide as carbon-dioxide sensor

Author

Rudraswamy, S.B. ; Basu, Palash Kumar ; Bhat, Nagaraj

Author_Institution

Dept. of Electr. Commun. Eng., IISc, Bangalore, India

fYear

2014

fDate

6-7 Jan. 2014

Firstpage

1

Lastpage

4

Abstract

Ag doped BaTiO₃-CuO mixed oxide thin films are evaluated for their carbon-dioxide sensing characteristics. The metal oxide films of different thicknesses are deposited on oxidized p type Si <;100> substrate by RF Sputtering. Sensing characteristics for different CO₂ concentration, (300 ppm - 1000 ppm) are obtained for different operating temperatures, (100° C - 400° C). Optimum temperature for maximum sensitivity is found to be 250° C. The effect of annealing on sensing properties is also evaluated. The unannealed films give better sensitivity than that of annealed films. Response time and recovery time are also calculated.

Keywords

annealing; barium compounds; carbon compounds; copper compounds; gas sensors; silver; sputter deposition; thin films; Ag doped BaTiO₃-CuO mixed oxide; CO₂; CuO-BaTiO₃:Ag; RF sputtering; Si; annealing; carbon-dioxide sensor; films thicknesses; metal oxide films; oxidized p type Si <;100> substrate; recovery time; response time; sensitivity characteristics; temperature 100 degC to 400 degC; Acceleration; Carbon dioxide; Films; Sensitivity; Sensors; Three-dimensional displays; X-ray scattering; BaTiO3-CuO; Carbon dioxide; Gas sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics, Computing and Communication Technologies (IEEE CONECCT), 2014 IEEE International Conference on

Conference_Location

Bangalore

Print_ISBN

978-1-4799-2318-2

Type

conf

DOI

10.1109/CONECCT.2014.6740279

Filename

6740279