Title :
High efficiency coupling with stacked MEMS coils
Author :
Xiuhan Li ; Li Yin ; Zilu Wang ; Quan Yuan ; Dongming Fang ; Haixia Zhang
Author_Institution :
Sch. of Electron. & Inf. Eng., Beijing Jiaotong Univ., Beijing, China
Abstract :
Wireless power delivery to implantable biomedical devices by means of inductive coupling has been proved to be feasible. MEMS coils which are fabricated with micro-fabrication technology are used as the coupling coils. MEMS coils were formed by Cu electroplating with the thickness of 15μm. This paper present a new stack packaged MEMS coils which are helpful in improving the coupling efficiency. An experiment setup was designed in order to measure RF transmission in bio body. Measurement results for PCB coils coupled with one, two and three stacked parallel connect MEMS coils both in air and in SBF(Simulated Body Fluid) solution was presented in this paper.
Keywords :
bioMEMS; coils; electromagnetic coupling; electroplating; microfabrication; prosthetic power supplies; PCB coils; RF transmission; electroplating; high efficiency coupling; implantable biomedical devices; inductive coupling; micro-fabrication technology; stacked MEMS coils; wireless power delivery; Attenuation; Attenuation measurement; Coils; Couplings; Micromechanical devices; Radio frequency; Wireless communication; Inductive coupling; Power delievery; SBF; Stacked MEMS coils;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-6543-9
DOI :
10.1109/NEMS.2010.5592446
