High efficiency coupling with stacked MEMS coils

Author

Xiuhan Li ; Li Yin ; Zilu Wang ; Quan Yuan ; Dongming Fang ; Haixia Zhang

Author_Institution

Sch. of Electron. & Inf. Eng., Beijing Jiaotong Univ., Beijing, China

fYear

2010

fDate

20-23 Jan. 2010

Firstpage

509

Lastpage

512

Abstract

Wireless power delivery to implantable biomedical devices by means of inductive coupling has been proved to be feasible. MEMS coils which are fabricated with micro-fabrication technology are used as the coupling coils. MEMS coils were formed by Cu electroplating with the thickness of 15μm. This paper present a new stack packaged MEMS coils which are helpful in improving the coupling efficiency. An experiment setup was designed in order to measure RF transmission in bio body. Measurement results for PCB coils coupled with one, two and three stacked parallel connect MEMS coils both in air and in SBF(Simulated Body Fluid) solution was presented in this paper.

Keywords

bioMEMS; coils; electromagnetic coupling; electroplating; microfabrication; prosthetic power supplies; PCB coils; RF transmission; electroplating; high efficiency coupling; implantable biomedical devices; inductive coupling; micro-fabrication technology; stacked MEMS coils; wireless power delivery; Attenuation; Attenuation measurement; Coils; Couplings; Micromechanical devices; Radio frequency; Wireless communication; Inductive coupling; Power delievery; SBF; Stacked MEMS coils;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on

Conference_Location

Xiamen

Print_ISBN

978-1-4244-6543-9

Type

conf

DOI

10.1109/NEMS.2010.5592446

Filename

5592446