Title :
A microfabricated temperature sensor for hyperthermia
Author :
Lin, Liwei ; Pei, Qiang ; Xu, Jiashan ; Guo, Hang
Author_Institution :
Pen-Tung Sah Micro-Nano Technol. Res. Center, Xiamen Univ., Xiamen, China
Abstract :
In this paper, we present design and fabrication of a temperature sensor of Pt thin film for real time accurately measuring temperature in tumor hyperthermia. Processing parameters for using magnetron sputtering to deposit Pt thin film are obtained through many trial processes in order to get the excellent thin film surface morphology and sensing performance. With finite element analysis in ANSYS, it confirms that the sensor has a fast dynamic response in two special contact situations between tumor and sensor in hyperthermia. The tested results show the developed sensor has a good linear output relationship and its TCR reaches 0.0031/°C, which is close to the industry standard value of the bulk Pt resistor sensor.
Keywords :
bioMEMS; finite element analysis; hyperthermia; metallic thin films; microfabrication; platinum; sputter deposition; surface morphology; temperature sensors; tumours; ANSYS; Pt thin film; bulk Pt resistor sensor; finite element analysis; magnetron sputtering; microfabricated temperature sensor; real time temperature measurement; thin film surface morphology; tumor hyperthermia;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-6543-9
DOI :
10.1109/NEMS.2010.5592468
