Performance evaluation of structural design for microgyroscope based on system vibration modes

A new energy-analysis method for microgyroscope to evaluate the dynamical performance is presented in the paper. The principle of performance evaluation is based on system vibration modes of a typical 2-mass microgyroscope in the view of the energy analysis. The natural frequency and corresponding mode shapes can be obtained by the combination of mode analysis and finite element analysis (FEA). And then the contribution of each mode for the whole performance is achieved by modal superposition. The energy distribution in the frequency domain of each mode for the microgyroscope is obtained. Using two types of complex tuning-fork mocrogyroscope, this principle is consequently verified. The proposed method can provide a reference for designers to estimate quickly without experimental investigations whether the structure has excellent characteristic, and can reduce production cost and development cycle of microgyroscope.