Title :
Simultaneous fly-height, pitch and crown measurements of RIE sliders by capacitance stripe
Author_Institution :
Alamaden Research Center
Keywords :
Capacitance measurement; Conductivity; Glass; Interferometry; Laboratories; Manufacturing industries; Manufacturing processes; Measurement standards; Rails; Standards development;
Conference_Titel :
Magnetics Conference, 1992. Digests of Intermag '92., International
Conference_Location :
St. Louis, MO, USA
Print_ISBN :
0-7803-0637-6
DOI :
10.1109/INTMAG.1992.696368