DocumentCode
2432809
Title
Simultaneous fly-height, pitch and crown measurements of RIE sliders by capacitance stripe
Author
Sonnenfeld, R.
Author_Institution
Alamaden Research Center
fYear
1992
fDate
13-16 April 1992
Firstpage
185
Lastpage
185
Keywords
Capacitance measurement; Conductivity; Glass; Interferometry; Laboratories; Manufacturing industries; Manufacturing processes; Measurement standards; Rails; Standards development;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 1992. Digests of Intermag '92., International
Conference_Location
St. Louis, MO, USA
Print_ISBN
0-7803-0637-6
Type
conf
DOI
10.1109/INTMAG.1992.696368
Filename
696368
Link To Document