System-level simulation of a micromachined electrostatically suspended gyroscope

This paper presents modeling and system-level simulation of a micromachined electrostatically suspended gyroscope (MESG). The MESG reported here employs a spinning wheel-like rotor, which is suspended by electrostatic force without any mechanical support. With the precession of the rotor sensed capacitively, stator electrodes rebalance the rotor to its null position by an electrostatic feedback control system. This force-feedback system is constructed based on CoventorWare, with which MEMS devices develop faster, higher quality, lower cost and easier optimizing, using both bottom-up and top-down approaches. The former approach creates 3D solid gyro model according to its fabrication process, while the latter one is to combine behavioral models and IC components together, which two are complementary to each other.