Polysilicon nanogap capacitive biosensors for the pH detection

Capacitive biosensor has been motivating subject to study for its zillion contributions in biomolecule detection. For this project, we present a novelty device provide highly sensitive detection using real time measurement. The fabrication of device involves only conventional lithographic process and simple dry oxidation process. By using the nanoscale dielectric spectroscopy between nanogap patterns, the effectiveness of nanogap is done by dropping 10μL of different pH onto between capacitor. Probing is done via dielectric analyzer on the couple of gold pad apart of the capacitive nanogap biosensor to investigate the effect of excitation frequency on capacitance sampling.