Title :
The alignment of carbon nano tube between Aluminum electrodes using AC dielectrophoresis method
Author :
Wah, Low Foo ; Halim, Nur Hamidah Abdul ; Hashim, Uda ; Nor, Nuzaihan Md ; Shamsuddin, Shahidah Arina
Author_Institution :
Inst. of Nano Electron. Eng. (INEE), Univ. Malaysia Perlis (UniMAP), Kangar, Malaysia
Abstract :
This paper presents the recent development and fabrication of carbon nanotubes (CNT) based on electrical devices. The silicon oxide is formed by dry oxidation and the Aluminum (Al) layer is deposited using Thermal Evaporator. The electrodes pad act as a bridge for CNT alignment. Then, this single-walled carbon nanotubes (SWNTs) was suspended in isopropyl alcohol (IPA) and Dichloromethane (DCM) solution in ultrasonic condition around 1 hour continuously. Then, the aligment of the CNT was carried out using AC dielectrophoresis and DC electrophoresis method.
Keywords :
aluminium; carbon nanotubes; electrochemical electrodes; electrophoresis; oxidation; silicon compounds; AC dielectrophoresis method; Al; CNT fabrication; DC electrophoresis method; SiO2; aluminum electrode pad; carbon nanotube alignment; dichloromethane solution; dry oxidation; electrical devices; isopropyl alcohol; single-walled carbon nanotubes; thermal evaporator; Aluminum; Carbon nanotubes; Dielectrophoresis; Electrodes; Scanning electron microscopy; Silicon; AC dielectrophoresis method; CNT; DC electrophoresis method;
Conference_Titel :
Micro and Nanoelectronics (RSM), 2011 IEEE Regional Symposium on
Conference_Location :
Kota Kinabalu
Print_ISBN :
978-1-61284-844-0
DOI :
10.1109/RSM.2011.6088338
