DocumentCode
2433157
Title
Four-terminal piezoresistive transducer: Theory and perspectives
Author
Gridchin, A.V.
Author_Institution
Novosibirsk State Tech. Univ., Novosibirsk, Russia
fYear
2009
fDate
28-31 Oct. 2009
Firstpage
206
Lastpage
226
Abstract
The paper presents theory and perspective of four-terminal silicon piezoresistive transducer (FTSP). FEM modeling and applications in pressure, moisture, and acidity sensing is also presented. The paper also discussed silicon nanowires and giant piezoresistive effect.
Keywords
finite element analysis; moisture measurement; nanowires; pH measurement; piezoresistance; piezoresistive devices; pressure sensors; transducers; FEM; Si; acidity sensor; giant piezoresistive effect; moisture sensor; piezoresistive transducer; pressure sensor; silicon nanowire; Piezoresistance; Seminars; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies, 2009. INTERNANO 2009. International School and Seminar on
Conference_Location
Novosibirsk
Print_ISBN
978-1-4244-5534-8
Type
conf
DOI
10.1109/INTERNANO.2009.5335610
Filename
5335610
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