Title :
Four-terminal piezoresistive transducer: Theory and perspectives
Author_Institution :
Novosibirsk State Tech. Univ., Novosibirsk, Russia
Abstract :
The paper presents theory and perspective of four-terminal silicon piezoresistive transducer (FTSP). FEM modeling and applications in pressure, moisture, and acidity sensing is also presented. The paper also discussed silicon nanowires and giant piezoresistive effect.
Keywords :
finite element analysis; moisture measurement; nanowires; pH measurement; piezoresistance; piezoresistive devices; pressure sensors; transducers; FEM; Si; acidity sensor; giant piezoresistive effect; moisture sensor; piezoresistive transducer; pressure sensor; silicon nanowire; Piezoresistance; Seminars; Transducers;
Conference_Titel :
Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies, 2009. INTERNANO 2009. International School and Seminar on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4244-5534-8
DOI :
10.1109/INTERNANO.2009.5335610
