DocumentCode
2433187
Title
Thermal imaging microscopy: Application for diagnostics the microelectronic devices
Author
Kuryshev, Georgy L.
Author_Institution
ISP, SB RAS, Novosibirsk, Russia
fYear
2009
fDate
28-31 Oct. 2009
Firstpage
186
Lastpage
198
Abstract
A thermal imaging microscope differs from thermal imagers and visible microscope by some peculiarities]. The array of photosensitive elements in the IR camera is spaced at = F (F is the focal length of the objective) and the object is at a large distance > 10F from the objective. Thermal imaging microscopy have wide possibilities for scientific and technical applications.
Keywords
cameras; infrared imaging; integrated circuits; IR camera; diagnostics; microelectronic devices; thermal imaging microscopy; Microelectronics; Microscopy; Seminars; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies, 2009. INTERNANO 2009. International School and Seminar on
Conference_Location
Novosibirsk
Print_ISBN
978-1-4244-5534-8
Type
conf
DOI
10.1109/INTERNANO.2009.5335612
Filename
5335612
Link To Document