Title :
Thermal imaging microscopy: Application for diagnostics the microelectronic devices
Author :
Kuryshev, Georgy L.
Author_Institution :
ISP, SB RAS, Novosibirsk, Russia
Abstract :
A thermal imaging microscope differs from thermal imagers and visible microscope by some peculiarities]. The array of photosensitive elements in the IR camera is spaced at = F (F is the focal length of the objective) and the object is at a large distance > 10F from the objective. Thermal imaging microscopy have wide possibilities for scientific and technical applications.
Keywords :
cameras; infrared imaging; integrated circuits; IR camera; diagnostics; microelectronic devices; thermal imaging microscopy; Microelectronics; Microscopy; Seminars; Transducers;
Conference_Titel :
Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies, 2009. INTERNANO 2009. International School and Seminar on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4244-5534-8
DOI :
10.1109/INTERNANO.2009.5335612
