The control of elastic traveling waves in thin-film free structures

Author

Nikulin, Dmitry M. ; Chesnokov, Vladimir V. ; Chesnokov, Dmitry V.

Author_Institution

Siberian State Geodetic Acad., Novosibirsk, Russia

fYear

2009

fDate

28-31 Oct. 2009

Firstpage

119

Lastpage

121

Abstract

A converter-display device for optoelectronic imaging is considered in this work. The image scanning is carried out by modulated elastic waves traveling on a one-dimensional matrix of micromechanical strip waveguides. Waveguides are formed by dividing a silicon membrane on parallel strips, which are attached to a supporting silicon frame by their ends. When individual excitating of all waveguides using the appropriate piezoelectric transducers, the surface of the display device will contain N times M relief elements, where N - number of waveguides, M-number of separated bending deformations.

Keywords

acoustic waveguides; acousto-optical devices; display devices; elastic waves; elemental semiconductors; micromechanical devices; piezoelectric transducers; semiconductor thin films; silicon; Si; bending deformation; converter-display device; elastic traveling waves; image scanning; micromechanical strip waveguides; optical modulation; optoelectronic imaging; piezoelectric transducers; silicon membrane; thin-film free structures; Biomembranes; Displays; Matrix converters; Micromechanical devices; Piezoelectric transducers; Silicon; Strips; Surface waves; Transistors; Transmission line matrix methods; Elastic waves; thin-film-free structure;

fLanguage

English

Publisher

ieee

Conference_Titel

Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies, 2009. INTERNANO 2009. International School and Seminar on

Conference_Location

Novosibirsk

Print_ISBN

978-1-4244-5534-8

Type

conf

DOI

10.1109/INTERNANO.2009.5335619

Filename

5335619