DocumentCode
2433423
Title
Parameters estimation of the MEM transducer with electrodes produced from different materials
Author
Dragunov, V.P. ; Lyutaeva, M.N.
Author_Institution
Novosibirsk State Tech. Univ., Novosibirsk, Russia
fYear
2009
fDate
28-31 Oct. 2009
Firstpage
93
Lastpage
96
Abstract
The paper contains mathematical expressions for computation of output power for MEM transducer with electrodes produced from different materials. Dependence of transducer output power on resonance frequency and its dependence on difference between work functions of electrode materials are analyzed.
Keywords
microelectrodes; microsensors; parameter estimation; work function; MEM transducer; electrode material analysis; mathematical expressions; parameter estimation; resonance frequency; work function; Capacitors; Chemicals; Electrodes; Packaging; Parameter estimation; Piezoelectric transducers; Power generation; Power system modeling; Seminars; Voltage; MEM transducer; Work function; output power;
fLanguage
English
Publisher
ieee
Conference_Titel
Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies, 2009. INTERNANO 2009. International School and Seminar on
Conference_Location
Novosibirsk
Print_ISBN
978-1-4244-5534-8
Type
conf
DOI
10.1109/INTERNANO.2009.5335625
Filename
5335625
Link To Document