Title :
Design, modeling and simulation of CMOS MEMS cantilever for carbon dioxide gas sensing
Author :
Mirza, Asif ; Khir, Mohd Haris Md ; Dennis, John Ojur ; Ashraf, Khalid ; Hamid, Nor Hisham
Author_Institution :
Dept. of Electr. & Electron. Eng., Univ. Teknol. PETRONAS, Bander Seri Iskandar, Malaysia
Abstract :
Carbon dioxide sensors have potential applications in medical diagnoses, health care, environmental monitoring, food and medicine industry. In recent years, many novel biological, physical and chemical sensors have employed microcantilevers due to their simplicity, ease of fabrication and integration with electronics. This paper presents design, modeling and simulation of a microcantilever working in dynamic mode for CO2 gas sensing with electromagnetic actuation and capacitive sensing using comb fingers. The sensor is based upon 0.35 micron CMOS technology. CoventorWare and MATLAB have been used as simulation software. According to the developed model and simulation results the resonator has a quality factor of 3333 in air and mass sensitivity of 3.2 Hz/ng.
Keywords :
CMOS integrated circuits; cantilevers; capacitive sensors; carbon compounds; electromagnetic actuators; gas sensors; mathematics computing; microfabrication; microsensors; CMOS MEMS cantilever; CO2; CoventorWare; MATLAB; air sensitivity; carbon dioxide gas sensing; chemical sensor; environmental monitoring; food industry; health care; mass sensitivity; medical diagnoses; medicine industry; microcantilever design; microcantilever modeling; microcantilever simulation; microfabrication; quality factor; simulation software; size 0.35 mum; Analytical models; Coils; Damping; Fingers; Q factor; Resonant frequency; Sensors; CMOS; Carbon dioxide; MEMS; Resonator; Sensor;
Conference_Titel :
Micro and Nanoelectronics (RSM), 2011 IEEE Regional Symposium on
Conference_Location :
Kota Kinabalu
Print_ISBN :
978-1-61284-844-0
DOI :
10.1109/RSM.2011.6088353
