Tubular micro- and nano- sensors and actuators for aerodynamics

Author

Seleznev, Vladimir A. ; Prinz, Victor Ya ; Aniskin, Vladimir A. ; Shiplyuk, Alexander N.

Author_Institution

Inst. of Semicond. Phys., SD RAS, Novosibirsk, Russia

fYear

2009

fDate

28-31 Oct. 2009

Firstpage

74

Lastpage

77

Abstract

New data on the fabrication and study of semiconductor micro- and nanotubes, and also on the application of such micro- and nanotubes as basic elements in sensors and actuators are reported. Fabrication methods for tubular micro- and nanosensors and actuators are described, and examples of fabricated devices are presented. The potential offered by the fabricated pilot devices in aerodynamic applications is demonstrated.

Keywords

actuators; aerodynamics; flow measurement; microfluidics; microsensors; nanofluidics; nanosensors; semiconductor nanotubes; actuators; aerodynamics; microtubes; semiconductor nanotubes; tubular microsensors; tubular nanosensors; Actuators; Aerodynamics; Biosensors; Chemical and biological sensors; Fabrication; Nanobioscience; Nanoscale devices; Sensor arrays; Sensor phenomena and characterization; Thermal sensors; Heterofilm; hotwire anemometer; microtube; nanotube;

fLanguage

English

Publisher

ieee

Conference_Titel

Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies, 2009. INTERNANO 2009. International School and Seminar on

Conference_Location

Novosibirsk

Print_ISBN

978-1-4244-5534-8

Type

conf

DOI

10.1109/INTERNANO.2009.5335627

Filename

5335627