DocumentCode :
2433492
Title :
Some new applications of physical chemistry to MEMS
Author :
Tian, Z.W.
Author_Institution :
Chem. Dept., Xiamen Univ., Xiamen, China
fYear :
2010
fDate :
20-23 Jan. 2010
Firstpage :
1
Lastpage :
16
Abstract :
If the product generated at an electrode can be rapidly consumed through a homogeneous scavenging reaction, the product will be confined within a very thin diffusion layer surrounding the electrode surface, called "Electrochemical Reaction Layer". The surface tension between an aqueous solution and hydrophilic/hydrophobic solid surface provides a simpler way to control fluid movement in micro-systems. According to this principle, a novel integrated print head was developed by our research group. In order to mobilize or stop the fluids or biological entities in the BioMEMs system and μ-TAS, micro fluid actuator (micro pump) is needed as one of the key components.
Keywords :
bioMEMS; electrophoresis; microactuators; microfabrication; microfluidics; nanofabrication; osmosis; physical chemistry; surface tension; 3D complex micro/nano fabrication; MEMS; electro-osmosis; electrochemical reaction layer; microfluid actuator; microfluid dispenser; physical chemistry; surface tension;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-6543-9
Type :
conf
DOI :
10.1109/NEMS.2010.5592516
Filename :
5592516
Link To Document :
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