Title :
Finite element analysis of a lateral microelectro-thermal actuator
Author :
Aziz, A.A. ; Rahman, M.S. ; Aris, Hasnizah
Author_Institution :
Fac. of Electr. Eng., Univ. Teknol. MARA, Shah Alam, Malaysia
Abstract :
This paper reports on research that designed, and characterized a lateral microelectro-thermal actuator using ANSYS in order to simulate. The aim of this study is mainly to compute and compare the blade tip displacement of the different materials at the same operation conditions when potential difference is applied across the electrical connection pads, resulting the total current and heat flow distributions all over the microelectro-thermal actuator.
Keywords :
finite element analysis; microactuators; temperature sensors; ANSYS; blade tip displacement; current flow distributions; electrical connection pads; finite element analysis; heat flow distributions; lateral microelectro-thermal actuator; potential difference; Actuators; Electric potential; Finite element methods; Gold; Heating; Shape; Solid modeling;
Conference_Titel :
Micro and Nanoelectronics (RSM), 2011 IEEE Regional Symposium on
Conference_Location :
Kota Kinabalu
Print_ISBN :
978-1-61284-844-0
DOI :
10.1109/RSM.2011.6088359
