• DocumentCode
    2433562
  • Title

    The decomposition mechanism of metastable solid GeO film

  • Author

    Astankova, Kseniya N. ; Gorokhov, Eugenie B. ; Volodin, Vladimir A. ; Latyshev, Alexander V. ; Vergnat, Michel

  • Author_Institution
    Inst. of Semicond. Phys., SB RAS, Novosibirsk, Russia
  • fYear
    2009
  • fDate
    28-31 Oct. 2009
  • Firstpage
    69
  • Lastpage
    73
  • Abstract
    The process of formation and decomposition of solid films of germanium monoxide from GeO vapor was studied using physical and chemical approaches. A model clarifying the metastability of solid GeO is developed. According the model, the structure of atomic orbitals (sigma- and n- bonds) of a GeO molecule causes the stability of GeO in gaseous phase. After condensation GeO(gas) harr GeO(solid), the atomic orbitals of Ge are transformed in lowest energy sp3-hybridized configuration, this configuration is universal both for Ge and for Ge02. The decomposition of GeO(solid) into Ge and GeO2 is caused by relaxation of deformation energy appearing due to big difference of Ge-Ge and Ge-O bond length.
  • Keywords
    bond lengths; condensation; dielectric thin films; dissociation; germanium compounds; metastable states; solid-vapour transformations; thermodynamics; GeO; atomic orbitals; bond length; condensation; decomposition mechanism; deformation energy relaxation; germanium monoxide; metastable solid film; sp3-hybridized configuration; thermodynamical metastability; Crystallization; Germanium; Heating; Lattices; Metastasis; Semiconductor films; Seminars; Solid state circuits; Stability; Temperature; Germanium oxide; metastability; sp3-hybridization;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies, 2009. INTERNANO 2009. International School and Seminar on
  • Conference_Location
    Novosibirsk
  • Print_ISBN
    978-1-4244-5534-8
  • Type

    conf

  • DOI
    10.1109/INTERNANO.2009.5335633
  • Filename
    5335633