Title :
An electrical method for determining the thickness of metal films and the cross-sectional area of metal lines
Author :
Schafft, Harry A. ; Mayo, Santos ; Jones, Samuel N. ; Suehle, John S.
Author_Institution :
Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
Abstract :
The electrical thickness of an aluminum-alloy metallization can be determined from resistance measurements of a van der Pauw cross structure at two temperatures, with corrections for the deviation from Matthiessen´s rule and for thermal expansion. Thickness determinations, made in this way, agree with those made with a calibrated scanning electron microscope (SEM) to within the uncertainty of the instrument. The electrical cross-sectional area of metal lines can be determined by making resistance measurements at two temperatures
Keywords :
aluminium alloys; integrated circuit metallisation; integrated circuit testing; thermal expansion; thickness measurement; IC metallisation; Matthiessen´s rule; aluminum-alloy metallization; cross-sectional area; electrical method; metal lines; resistance measurements; thermal expansion; thickness determinations; van der Pauw cross structure; Area measurement; Conductivity; Electric resistance; Electrical resistance measurement; Metallization; NIST; Scanning electron microscopy; Temperature measurement; Testing; Thickness measurement;
Conference_Titel :
Integrated Reliability Workshop, 1994. Final Report., 1994 International
Conference_Location :
Lake Tahoe, CA
Print_ISBN :
0-7803-1908-7
DOI :
10.1109/IRWS.1994.515820
