Title :
FEM simulation of piezoresistive pressure module
Author :
Gridchin, Victor A. ; Chebanov, Michail A.
Author_Institution :
Dept. of Semicond. devices & Microelectron., Novosibirsk State Tech. Univ., Novosibirsk, Russia
Abstract :
The impact of singularity points on stress distribution in piezoresistive module is investigated by means of FEM simulation. Strong influence of singularities on stress distribution in silicon-glass interface is presented in this paper.
Keywords :
elemental semiconductors; finite element analysis; piezoresistive devices; pressure sensors; silicon; FEM simulation; Si; silicon piezoresistive pressure sensors; silicon-glass interface; stress distribution; Capacitive sensors; Glass; Mathematical model; Mechanical sensors; Piezoresistance; Piezoresistive devices; Seminars; Silicon; Stress; Temperature sensors; FEM simulation; pressure sensor; singular points;
Conference_Titel :
Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies, 2009. INTERNANO 2009. International School and Seminar on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4244-5534-8
DOI :
10.1109/INTERNANO.2009.5335638
