Title :
Aging in Quartz SAW Resonators
Author :
Shreve, William R.
Keywords :
Aging; Etching; Frequency; Narrowband; Plasma applications; Plasma devices; Plasma materials processing; Plasma temperature; Surface acoustic waves; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 1977
DOI :
10.1109/ULTSYM.1977.196959