Title :
Study on the precise stepper actuator with piezoelectric stack pump
Author :
Fan, Zunqiang ; Liu, Jianfang ; Li, Jianqiao ; Yang, Zhigang ; He, Lin
Author_Institution :
Coll. of Mech. Sci. & Technol., JiLin Univ., Chang Chun, China
Abstract :
This paper presents a piezoelectric stack pump for precise actuator. The piezoelectric pump is characterized by long travel range, precise flow, large driving force, etc. Simulations and experiments showed that the piezoelectric pump has high efficiency and good performance. With a voltage of 100V, the flow rate is linear when the rectangle pulses count, so the displacement can be controlled. And its power consumption is low. It studied the effect relationship between frequency and driving velocity under no-load state of the actuator. A multi-chamber pump with buffer chamber structure prevents the valve failure under extreme high pressure. The ultra-precision actuator developed can achieve step resolution 0.038μm. The maximum driving force is 42N. The maximum driving velocity is 14.8mm/s and at the best velocity driving frequency is 120Hz.
Keywords :
microactuators; micropumps; microvalves; buffer chamber structure; driving force; driving frequency; driving velocity; frequency 120 Hz; multichamber pump; piezoelectric pump; piezoelectric stack pump; power consumption; precise stepper actuator; ultra-precision actuator; valve failure; voltage 100 V; Large flow rate; Multi-chamber pump; Piezoelectric stack pump; Piezoelectric vibrator;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-6543-9
DOI :
10.1109/NEMS.2010.5592540