Study on the precise stepper actuator with piezoelectric stack pump

This paper presents a piezoelectric stack pump for precise actuator. The piezoelectric pump is characterized by long travel range, precise flow, large driving force, etc. Simulations and experiments showed that the piezoelectric pump has high efficiency and good performance. With a voltage of 100V, the flow rate is linear when the rectangle pulses count, so the displacement can be controlled. And its power consumption is low. It studied the effect relationship between frequency and driving velocity under no-load state of the actuator. A multi-chamber pump with buffer chamber structure prevents the valve failure under extreme high pressure. The ultra-precision actuator developed can achieve step resolution 0.038μm. The maximum driving force is 42N. The maximum driving velocity is 14.8mm/s and at the best velocity driving frequency is 120Hz.