Influence of hydrogen on optical properties of LPCVD amorphous silicon films

Author

Mroz, B. ; Moon, B.Y. ; Jang, J. ; Pietruszko, S.M.

Author_Institution

Inst. of Microelectron. & Optoelectron., Warsaw Univ. of Technol., Poland

fYear

1997

fDate

29 Sep-3 Oct 1997

Firstpage

671

Lastpage

673

Abstract

The dependence of different optical parameters such as refractive index (n), optical absorption coefficient (a), slope of Tauc plot (C), optical band gap (E_G), dispersion energy (E_d), average excitation energy (E₀), static refractive index (n ₀) on hydrogen content is reported in this paper. It was found that these parameters significantly depend on hydrogen concentration in LPCVD amorphous silicon films

Keywords

CVD coatings; amorphous semiconductors; chemical vapour deposition; elemental semiconductors; energy gap; hydrogen; refractive index; semiconductor thin films; silicon; LPCVD amorphous silicon films; Si:H; Tauc plot slope; a-Si:H thin films; average excitation energy; dispersion energy; hydrogen content; optical absorption coefficient; optical band gap; optical properties; refractive index; solar cells; static refractive index; Absorption; Amorphous materials; Amorphous silicon; Hydrogen; Optical films; Optical refraction; Optical variables control; Photonic band gap; Refractive index; Semiconductor films;

fLanguage

English

Publisher

ieee

Conference_Titel

Photovoltaic Specialists Conference, 1997., Conference Record of the Twenty-Sixth IEEE

Conference_Location

Anaheim, CA

ISSN

0160-8371

Print_ISBN

0-7803-3767-0

Type

conf

DOI

10.1109/PVSC.1997.654178

Filename

654178