DocumentCode :
2434216
Title :
Mechanism of Composition Change in Sputter Deposition of Barium Ferrite Films with sputtering Gas Pressure
Author :
Suzuki, Einoshin ; Hoshi, Yusuke ; Naoe, Masayuki
Author_Institution :
Tokyo Inst. of Polytechnics
fYear :
1998
fDate :
6-9 Jan. 1998
Firstpage :
19
Lastpage :
19
Keywords :
Annealing; Atomic layer deposition; Atomic measurements; Barium; Coercive force; Ferrite films; Iron; Magnetic films; Magnetic properties; Sputtering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
MMM-Intermag Conference, 1998. Abstracts., The 7th Joint
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-5118-5
Type :
conf
DOI :
10.1109/INTMAG.1998.735492
Filename :
735492
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2434216
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