• DocumentCode
    2434420
  • Title

    The Acousto-Optic Properties of Thin-Film Si3N4, Ta2O5, ZnO and 7059 Glass on Oxidized Silicon Substrates

  • Author

    Hickernell, F.S. ; Davis, R.L. ; Richard, F.V.

  • fYear
    1978
  • fDate
    25-27 Sept. 1978
  • Firstpage
    60
  • Lastpage
    63
  • Keywords
    Glass; Optical buffering; Optical films; Optical refraction; Optical variables control; Optical waveguides; Semiconductor thin films; Silicon; Substrates; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    1978 Ultrasonics Symposium
  • Conference_Location
    Cherry Hill, NJ, USA
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1978.197004
  • Filename
    1533944