DocumentCode
2434420
Title
The Acousto-Optic Properties of Thin-Film Si3 N4 , Ta2O5 , ZnO and 7059 Glass on Oxidized Silicon Substrates
Author
Hickernell, F.S. ; Davis, R.L. ; Richard, F.V.
fYear
1978
fDate
25-27 Sept. 1978
Firstpage
60
Lastpage
63
Keywords
Glass; Optical buffering; Optical films; Optical refraction; Optical variables control; Optical waveguides; Semiconductor thin films; Silicon; Substrates; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
1978 Ultrasonics Symposium
Conference_Location
Cherry Hill, NJ, USA
Type
conf
DOI
10.1109/ULTSYM.1978.197004
Filename
1533944
Link To Document