Simulation of a planar PDMS micropump using in-contact, low-leakage check valves

We present a lumped-parameter dynamic model for a planar poly(dimethylsiloxane) (PDMS) micropump using in-contact, virtually zero-leakage check valves to provide critical insights into the dynamic characteristics of the planar micropump operation. The model features a single-plane microfluidic chamber sandwiched between two check valves, which allows for reliable operation and easy system integration. Theoretic equations have been developed based on the coupled interaction of the fluid flow and the structural motion, combined with external pneumatic actuation directly applied. Furthermore, we have resolved the equations analytically and analyzed the dynamic performance of this micropump. Systematic analysis using this model studied comprehensive factors including the motion of the actuated diaphragm, the applied pressure, and pumping chamber height. Compared with experimental characterization data, this model shows good agreement with the experimental results, demonstrating its utility as a useful tool for analyzing and designing the planar micropump.