DocumentCode
2434681
Title
Design and fabrication of a high fill-factor micro-mirror array
Author
Li, Sihua ; Xu, Jing ; Wu, Yaming
Author_Institution
State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Shanghai, China
fYear
2010
fDate
20-23 Jan. 2010
Firstpage
1048
Lastpage
1051
Abstract
In this paper, we propose and demonstrate a novel micro-mirror array. The Micro-mirror structure with terraced electrodes was simulated with the aid of CoventorWare and the simulation results show that the micro-mirror can obtain a required tilted angle. Si-Si bonding technology is used for fabricating the Micro-mirror array and an array with high Fill factor of 97% has been achieved.
Keywords
micromirrors; optical fabrication; silicon; CoventorWare; Si-Si; Si-Si bonding technology; fill factor; micromirror array; terraced electrodes; tilted angle; MEMS; Micro-mirror Array; Si-Si bonding; high fill-factor; wavelength-selective switch (WSS);
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location
Xiamen
Print_ISBN
978-1-4244-6543-9
Type
conf
DOI
10.1109/NEMS.2010.5592576
Filename
5592576
Link To Document