Title :
Design and fabrication of a high fill-factor micro-mirror array
Author :
Li, Sihua ; Xu, Jing ; Wu, Yaming
Author_Institution :
State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Shanghai, China
Abstract :
In this paper, we propose and demonstrate a novel micro-mirror array. The Micro-mirror structure with terraced electrodes was simulated with the aid of CoventorWare and the simulation results show that the micro-mirror can obtain a required tilted angle. Si-Si bonding technology is used for fabricating the Micro-mirror array and an array with high Fill factor of 97% has been achieved.
Keywords :
micromirrors; optical fabrication; silicon; CoventorWare; Si-Si; Si-Si bonding technology; fill factor; micromirror array; terraced electrodes; tilted angle; MEMS; Micro-mirror Array; Si-Si bonding; high fill-factor; wavelength-selective switch (WSS);
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-6543-9
DOI :
10.1109/NEMS.2010.5592576
