Title :
Quartz Resonators at Fundamental Frequencies Greater than 100 MHz
Author :
Berté, M. ; Hartemann, P.
Keywords :
Argon; Biomembranes; Electrodes; Etching; Frequency conversion; Milling; Q measurement; Resonance; Resonant frequency; Surface acoustic waves;
Conference_Titel :
1978 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1978.197021