Title :
High performance MEMS spiral inductors
Author :
Fang, Dong-Ming ; Yuan, Quan ; Li, Xiu-Han ; Zhang, Hai-Xia ; Zhou, Yong ; Zhao, Xiao-Lin
Author_Institution :
Inst. of Microelectron., Peking Univ., Beijing, China
Abstract :
In this paper, fabrication and performance of RF MEMS planar spiral inductors is presented. The fabrication process is simple, using surface micromachined technology with three masks. Two types of spiral inductor were fabricated and the measured results showed that the spiral inductors had high performance at high frequency. The maximum quality of the spiral inductor-Type A is 15.8 at 1.4 GHz with inductance of 4.61 nH. The maximum quality of the spiral inductor-Type B is 19.7 at 4.1 GHz with inductance of 1.40 nH.
Keywords :
inductors; micromachining; micromechanical devices; RF MEMS planar spiral inductors; frequency 1.4 GHz; frequency 4.1 GHz; spiral inductor-Type A; spiral inductor-Type B; surface micromachined technology;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-6543-9
DOI :
10.1109/NEMS.2010.5592582
