Spectroscopic characteristics of high power pulse operated multi-gas microplasma sourece for elemental analysis

In this study, we have developed a microplasma source for elemental analysis. A high power pulse driven microplasma device was developed and tested. Short (<1 mus) but high voltage (-2.5 kV) pulse is applied for plasma ignition and then long (-10 mus) and relatively low voltage (-0.5 kV) pulse is applied for excitation and ionization of analytes. As a result, the peak electric power of 40 kW was achieved and 1500 times higher emission intensity compare with DC discharge was observed. In addition, stable plasma can be generated using not only helium or argon, but neon, nitrogen, oxygen, air and CO₂ gases. It was difficult to detect halogen elements by Ar-ICP because halogens has higher excitation potential. But, in this study, halogens could be detected with high sensitivity by helium plasma. Measurement results of small amount samples and spectroscopic characteristics of the microplasma will be reported.