DocumentCode
2435663
Title
Modeling ion sources with application to neutron generation and surface treatment
Author
Stoltz, Peter H.
Author_Institution
Tech-X Corp., Boulder, CO
fYear
2008
fDate
15-19 June 2008
Firstpage
1
Lastpage
1
Abstract
We present simulation results of two ion sources: (i) a pulsed, cold cathode ion source used for generation of neutrons, and (ii) an anode layer ion source used for treatment of surfaces in industrial applications. We compare the simulation results with experiment: in case (i), we compare the neutron yield with measured yields, and in case (ii), we compare the energy distribution far from the cathode with measured distributions. We discuss the physics effects we include in the simulations, such as impact ionization and secondary electrons due to electron and ion impact on the anode and cathode, and how those impact the results. Finally, we show a new Web based interface to examine the various physics effects in the code. This web based interface allows users to examine cross sections, secondary electron production rates, and other physics effects in a user friendly way and without the overhead of a full simulation.
Keywords
anodes; cathodes; impact ionisation; ion sources; plasma materials processing; plasma simulation; plasma sources; surface treatment; anode; cold cathode; energy distribution; impact ionization; ion impact; ion sources; neutron generation; secondary electron production; secondary electrons; surface treatment; Anodes; Cathodes; Electrons; Energy measurement; Impact ionization; Ion sources; Neutrons; Physics; Pulse generation; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 2008. ICOPS 2008. IEEE 35th International Conference on
Conference_Location
Karlsruhe
ISSN
0730-9244
Print_ISBN
978-1-4244-1929-6
Electronic_ISBN
0730-9244
Type
conf
DOI
10.1109/PLASMA.2008.4590684
Filename
4590684
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