Title :
Modeling ion sources with application to neutron generation and surface treatment
Author :
Stoltz, Peter H.
Author_Institution :
Tech-X Corp., Boulder, CO
Abstract :
We present simulation results of two ion sources: (i) a pulsed, cold cathode ion source used for generation of neutrons, and (ii) an anode layer ion source used for treatment of surfaces in industrial applications. We compare the simulation results with experiment: in case (i), we compare the neutron yield with measured yields, and in case (ii), we compare the energy distribution far from the cathode with measured distributions. We discuss the physics effects we include in the simulations, such as impact ionization and secondary electrons due to electron and ion impact on the anode and cathode, and how those impact the results. Finally, we show a new Web based interface to examine the various physics effects in the code. This web based interface allows users to examine cross sections, secondary electron production rates, and other physics effects in a user friendly way and without the overhead of a full simulation.
Keywords :
anodes; cathodes; impact ionisation; ion sources; plasma materials processing; plasma simulation; plasma sources; surface treatment; anode; cold cathode; energy distribution; impact ionization; ion impact; ion sources; neutron generation; secondary electron production; secondary electrons; surface treatment; Anodes; Cathodes; Electrons; Energy measurement; Impact ionization; Ion sources; Neutrons; Physics; Pulse generation; Surface treatment;
Conference_Titel :
Plasma Science, 2008. ICOPS 2008. IEEE 35th International Conference on
Conference_Location :
Karlsruhe
Print_ISBN :
978-1-4244-1929-6
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2008.4590684