Title :
High Q and GHz SAW Resonators
Author :
Tanski, William J.
Keywords :
Acoustic diffraction; Acoustic reflection; Acoustic transducers; Conductivity; Electrodes; Etching; Resonant frequency; Surface acoustic waves; Viscosity; Yield estimation;
Conference_Titel :
1978 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1978.197076
