GaAs MMIC design using basic elements library

In this report the issues related to the design of microwave monolithic and hybrid-monolithic integrated circuits using the library of basic elements are considered. The MMIC production technique is shown which provides for the generation of active and passive circuit elements with a electronic microscope dimensional processing at resolutions below 0.25/spl mu/m and with a 1/spl mu/m photolithographic processing. The structure of the library of basic elements is shown, which includes metal and mesa-resistors, metal-insulator-metal capacitors, inductors, air bridges, plated holes, and field effect transistors. The topological standards for the base elements are integrated into the production cycle. The design of a monolithic low noise amplifier and a hybrid-monolithic amplifier is shown.