Title :
Polymerization and nano composite deposition by atmospheric pressure plasma (APPECVD)
Author :
Gulec, Ali ; Oksuz, Lutfi ; Uygun, Aysegul
Author_Institution :
Fac. of Sci. & Art, Dept. of Phys., Suleyman Demirel Univ., Isparta
Abstract :
A dielectric barrier atmospheric pressure RF plasma system has been built using 13.56 MHz RF source with an homemade matching unit. A RF glow discharge is obtained with the helium flow and furan is introduced to the system. Polyfuran deposition is obtained onto glass and the characteristics of thin film are analyzed. In the same experimental setup, polythiophene and polyfuran composites are deposited in the presence of TiO2 nano particles. The morphological, chemical structure, thermal and electrical characteristics are investigated. The plasma polymerization indicated different results than the conventional polymerization of similar thin films.
Keywords :
filled polymers; glow discharges; nanocomposites; particle reinforced composites; plasma CVD; polymer films; polymerisation; titanium compounds; RF glow discharge; RF plasma system; TiO2; atmospheric pressure plasma; chemical characteristics; dielectric barrier; electrical characteristics; frequency 13.56 MHz; morphological characteristics; nanocomposite deposition; nanoparticles; polyfuran deposition; polymerization; structure characteristics; thermal characteristics; Atmospheric-pressure plasmas; Dielectric thin films; Glass; Glow discharges; Helium; Plasma properties; Plasma sources; Polymer films; Radio frequency; Sputtering;
Conference_Titel :
Plasma Science, 2008. ICOPS 2008. IEEE 35th International Conference on
Conference_Location :
Karlsruhe
Print_ISBN :
978-1-4244-1929-6
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2008.4590731
