Title :
Texture And Magnetic Properties Of FeTaN Films Bias-sputtered On Sloping Surfaces
Author :
Hong, Jonggi ; Wang, Shan X. ; Rook, K.
Author_Institution :
Stanford Univ.
Keywords :
Argon; Coercive force; Electron beams; Insulation; Magnetic films; Magnetic properties; Resists; Saturation magnetization; Substrates; Surface texture;
Conference_Titel :
MMM-Intermag Conference, 1998. Abstracts., The 7th Joint
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-5118-5
DOI :
10.1109/INTMAG.1998.735679