DocumentCode
2436663
Title
Low Temperature Processing Of Coil Insulating Photoresist By Electron Beam Irradiation
Author
Jennison, M.J. ; Young K.Kim
Author_Institution
Quantum Corp.
fYear
1998
fDate
6-9 Jan. 1998
Firstpage
64
Lastpage
64
Keywords
Anisotropic magnetoresistance; Coils; Curing; Electron beams; Giant magnetoresistance; Insulation; Magnetic heads; Plasma temperature; Resists; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
MMM-Intermag Conference, 1998. Abstracts., The 7th Joint
Conference_Location
San Francisco, CA, USA
Print_ISBN
0-7803-5118-5
Type
conf
DOI
10.1109/INTMAG.1998.735681
Filename
735681
Link To Document