• DocumentCode
    2436851
  • Title

    Low profile integrated passive devices with 3D high density capacitors ideal for embedded and die stacking solutions

  • Author

    Bunel, Catherine ; Pommier, Mickael ; Jacqueline, Sebastien

  • Author_Institution
    IPDIA Stephan Borel, CEA LETI
  • fYear
    2012
  • fDate
    17-20 Sept. 2012
  • Firstpage
    1
  • Lastpage
    36
  • Abstract
    • The low profile IPDIA technology capability is limited by the density of the trench capacitor, more explicitly by the depth of the trench. • The 80μm Low Profile node dedicated to the highest capacitor density is qualified. • IPDIA is providing the lowest profile 3D Silicon capacitors with a superior stability and reliability over a wide temperature range. • Ideal solution where volume and weight are major concerns.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic System-Integration Technology Conference (ESTC), 2012 4th
  • Conference_Location
    Amsterdam, Netherlands
  • Print_ISBN
    978-1-4673-4645-0
  • Type

    conf

  • DOI
    10.1109/ESTC.2012.6542168
  • Filename
    6542168