Title :
Low profile integrated passive devices with 3D high density capacitors ideal for embedded and die stacking solutions
Author :
Bunel, Catherine ; Pommier, Mickael ; Jacqueline, Sebastien
Author_Institution :
IPDIA Stephan Borel, CEA LETI
Abstract :
• The low profile IPDIA technology capability is limited by the density of the trench capacitor, more explicitly by the depth of the trench. • The 80μm Low Profile node dedicated to the highest capacitor density is qualified. • IPDIA is providing the lowest profile 3D Silicon capacitors with a superior stability and reliability over a wide temperature range. • Ideal solution where volume and weight are major concerns.
Conference_Titel :
Electronic System-Integration Technology Conference (ESTC), 2012 4th
Conference_Location :
Amsterdam, Netherlands
Print_ISBN :
978-1-4673-4645-0
DOI :
10.1109/ESTC.2012.6542168