DocumentCode
2437966
Title
Nondestructive Evaluation of Si Wafers Using SAW
Author
Das, P. ; Roy, M.K. ; Webster, R.T. ; Varahramyan, K.
fYear
1979
fDate
1979
Firstpage
278
Lastpage
283
Keywords
Acoustic signal detection; Acoustic testing; Acoustic transducers; Acoustic waves; Attenuation; Conductivity; Probes; Semiconductor device testing; Surface acoustic waves; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
1979 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1979.197207
Filename
1534147
Link To Document