DocumentCode :
2437966
Title :
Nondestructive Evaluation of Si Wafers Using SAW
Author :
Das, P. ; Roy, M.K. ; Webster, R.T. ; Varahramyan, K.
fYear :
1979
fDate :
1979
Firstpage :
278
Lastpage :
283
Keywords :
Acoustic signal detection; Acoustic testing; Acoustic transducers; Acoustic waves; Attenuation; Conductivity; Probes; Semiconductor device testing; Surface acoustic waves; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1979 Ultrasonics Symposium
Type :
conf
DOI :
10.1109/ULTSYM.1979.197207
Filename :
1534147
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2437966
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