DocumentCode
2438243
Title
Stochastic heating in capacitively coupled plasmas
Author
Bayrak, M. ; Brinkmann, R.P.
Author_Institution
Dept..forTheoretical Electr. Eng., Ruhr Univ. Bochum, Bochum
fYear
2008
fDate
15-19 June 2008
Firstpage
1
Lastpage
1
Abstract
This paper presents a new numerical method for solving the reduced kinetic equation. This technique is based on the finite volume control method, which is often used in computational fluid dynamics. Additionally, in the boundary conditions the stochastic heating mechanism of the sheath is taken into account. Furthermore, the quasineutrality condition instead of the Poisson equation to solve the potential is used.
Keywords
finite volume methods; plasma heating; plasma kinetic theory; plasma sheaths; plasma simulation; stochastic processes; Poisson equation; capacitively coupled plasmas; computational fluid dynamics; finite volume control method; quasineutrality condition; reduced kinetic equation; sheath; stochastic heating; Distribution functions; Electrons; Heat engines; Kinetic theory; Plasma density; Plasma simulation; Plasma temperature; Poisson equations; Resistance heating; Stochastic processes;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 2008. ICOPS 2008. IEEE 35th International Conference on
Conference_Location
Karlsruhe
ISSN
0730-9244
Print_ISBN
978-1-4244-1929-6
Electronic_ISBN
0730-9244
Type
conf
DOI
10.1109/PLASMA.2008.4590832
Filename
4590832
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