Title :
Investigation of gasochromic effects in TiO2 thin films doped with W, Cr, Mo
Author :
Gatner, Dawid ; Prociow, Eugeniusz L. ; Domaradzki, Jaroslaw ; Kaczmarek, Danuta ; Wojcieszak, Damian ; Mazur, Michal ; Zielinski, Maciej
Author_Institution :
Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland
Abstract :
In this paper gasochromic properties of TiO2 thin films doped with W, Cr and Mo have been presented. Prepared TiO2:(W, Cr, Mo) thin films exhibit reversible coloring- bleaching changes during expose to gaseous ethanol and air, alternatively. The TiO2:(W, Cr, Mo) thin films were deposited by modified high-energy (HE) magnetron sputtering method. The composition analysis performed by EDS method have shown that in prepared thin film was 29.3 at.% Mo, 2.14 at.% Cr and 1.93% at. % W. The optical properties of the sample were characterized by use of optical transmission spectroscopy. Coloring-bleaching processes are thermally activated and were observed in temperature higher than 300°C. For temperature 350°C film exhibits high optical transmission changes with fast kinetics.
Keywords :
X-ray chemical analysis; chromium; light transmission; molybdenum; optical saturable absorption; semiconductor growth; semiconductor materials; semiconductor thin films; sputter deposition; titanium compounds; tungsten; EDS method; TiO2:W,Cr,Mo; composition analysis; gasochromic effects; modified high-energy magnetron sputtering method; optical properties; optical transmission changes; optical transmission spectroscopy; reversible coloring-bleaching processes; temperature 350 degC; titania thin films; Bleaching; Chromium; Ethanol; Helium; Magnetic analysis; Optical films; Performance analysis; Sputtering; Temperature; Transistors;
Conference_Titel :
Students and Young Scientists Workshop "Photonics and Microsystems", 2009 International
Conference_Location :
Wernigerode
Print_ISBN :
978-1-4244-4304-8
DOI :
10.1109/STYSW.2009.5470310
