Methods of selectivity improvements of semiconductor gas sensors

In this paper, methods for selectivity improvement of semiconductor gas sensors are presented. The frequently used techniques are: temperature modulation, synthesis of new materials, designing new sensor constructions, adopting filter layers and using of sensors array. A comparison between the different methods has been made. It was concluded that the kind of sensing material and filter layer have a strong influence on the sensor parameters. The analysis has shown that the optimal detection temperature change when using multilayer gas sensors.